Supplied with C-887 hexapod multi-axis vector controller and software package, 6-axis Model H-850KMLD provides 1 µm minimum incremental motion over 100 mm travel range in XY and 0.5 µm in Z direction. Repeatability in 3 linear axes is ±1 µm, and ±5 µrad/9 µrad in rotary axes. Applications include precision manufacturing and automation, astronomical telescopes, optics alignment, satellite antenna alignment, high energy physics, and semiconductor manufacturing.
This story is related to the following:Controls and ControllersLinear Positioners | Positioning Systems | Hexapods |