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Corrosion-Resistant Transfer Valves suit SEMI applications.

2013-01-03 14:29:47| Industrial Newsroom - All News for Today

Pneumatically operated and locked in closed and open position, VAT S043/S053 REAL L-MOTION Valve serves SEMI applications handling 200, 300, and 450 mm wafers as well as brightness bridge LED (HB-LED) applications. Products handle such corrosive process environments as Etch and CVD, offering extended service intervals. Actuator has integrated, mechanically triggered sequence control, ensuring trouble-free operation in demanding applications with fully protected bellows feedthrough. This story is related to the following:Transfer Valves |

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Category:Industrial Goods and Services

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