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TSMC Work on 5nm Process Leaves EUV Undecided | EE Times

2015-12-15 17:39:07| Semiconductors - Topix.net

Taiwan Semiconductor Manufacturing Co. , the world's largest foundry, said it has started work on a 5nm process to push ahead its most advanced technology, yet the company remains undecided on the adoption of extreme ultraviolet lithography at that node.

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