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XY Air Bearing Stages deliver precise, vibration-free motion.

2016-02-16 14:31:07| Industrial Newsroom - All News for Today

Equipped with fully preloaded air bearings, A-311 PIglide IS Series features frictionless motion, resulting in negligible hysteresis or reversal error and zero-wear of mechanical components. Due to air bearing’s surface averaging effect, pitch/yaw/roll and straightness/flatness are significantly better than with conventional mechanical bearings. Planar XY stages are suited for metrology, wafer inspection, laser marking, and other precision motion applications.

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