Automated batch wet chemical processing system, Cintillio-S™, offers platform for acid, solvent, and ozone processing. Through productivity, industrial automation, and process control, platform targets FEOL and BEOL manufacturing as well as wafer-scale packaging. System also leverages aspects of Cintillio G2 system, including flexible chemical layout, modern controller design, and diagnostics. Electromechanical components for process and automation modules ensure supply chain continuity.