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Compact Turbo Molecular Pumps have integrated power supplies.

2013-09-04 14:31:56| Industrial Newsroom - All News for Today

Intended for semiconductor and flat panel display manufactures, TMP-X2905/X3405 series handles pumping of corrosive gases used in etching equipment (hard processing). Rotation speed of turbines produces vacuum which enables pumping at molecular flow level. Anti-corrosive coating and dynamic seals prevent erosion, and pumping speeds range from 300–4,000 Lps. Ranging in size from 350 x 458 mm to 400 x 395 mm, pumps integrate temperature control function and do not require racks or cables. This story is related to the following:Turbomolecular Pumps

Tags: power supplies integrated compact

Category:Industrial Goods and Services

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