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Cymer Announces its New XLR 700ix DUV Light Source

2014-12-01 01:35:03| Electronics - Topix.net

Improves on-wafer critical dimension uniformity, enabling higher productivity San Diego, California, December 1, 2014 - Cymer, LLC, an ASML company, the world's leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced its new argon fluoride immersion light source, the XLR 700ix. Built on the industry leading XLR platform, the 700ix provides improvements in bandwidth, wavelength and energy stability, enabling higher scanner throughput and process stability for advanced 14nm chip manufacturing and beyond.

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Category:Electronics and Electrical

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