Used for characterization of spectral measurements from vacuum ultraviolet (VUV) to NIR, VUV universal spectrophotometer can measure reflectance, transmission, and fluorescence emission over its complete working range of 120 nm to 2.2 microns. Test system includes sample chamber with toroidal optics, can operate purged or under vacuum, and interfaces to cryogenic and heated sample mounts. Other features include auxiliary ports in sample area and interchangeable 5-position sample holders.