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EUV Integration at 5nm Still Risky, With Major Problems to Solve

2018-03-06 13:30:49| Extremetech

TSMC, GlobalFoundries, Samsung, and Intel are all integrating EUV at future process nodes, even though major research firms are warning about high defect densities and other problems. Why the rush? The post EUV Integration at 5nm Still Risky, With Major Problems to Solve appeared first on ExtremeTech.

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