To offer maximum dynamic performance, single-axis dynAXISse galvanometer scanner units and intelliSCANse 2D scan systems leverage digital position detection approach that lowers moments of inertia of drives in high-precision semiconductor processing or micro-structuring. Digital se-encoder (SCANLAB encoder) uses zero-mass laser beam to sense stationary scale, eliminating need for additional inertia-increasing components while increasing reliability of micro-optical sensing.
This story is related to the following:Test and Measuring Instruments2D Scanners | Digital Encoders |