Incorporating Shuttlelock® SLR technology, repackaged with updated, tier one components, Apex SLR is suited for wide range of uniform Inductively Coupled Plasma etch applications. Load lock system features 4-button control for processing in less than 1.0 m² footprint. Built and controlled with PLC and DeviceNet software, Apex SLR is available with both laser and optical emission spectroscopy endpoint technologies to augment processing capability.
This story is related to the following:Plasma Etching Systems