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Mass Flow Controller aids semiconductor manufacturers.

2013-04-30 14:35:08| Industrial Newsroom - All News for Today

Insensitive to pressure transients, Model GF135 provides real-time integral rate-of-decay flow measurement. Data can be used to optimize accuracy at critical low-flow set points, set up alarm limits for critical performance parameters, and monitor trends for predictive maintenance. With advanced diagnostic capabilities that verify accuracy, check valve leak-by, and monitor sensor drift, semiconductor manufacturers can maintain uniformity in etch profiles and critical dimensions. This story is related to the following:Machinery and Machining Tools Sponsored by: Haas Automation, Inc. - Category Sponsor AdSearch for suppliers of: Process Controllers | Mass Flow Controllers | Semiconductor Processing Equipment

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