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Mass Flow Controllers serve semiconductor, LED applications.

2014-08-06 14:30:55| Industrial Newsroom - All News for Today

High-purity GF101 as well as ultra high-purity GF121 and GF126 deliver accuracy and response time suited for gas flow control in semiconductor and LED manufacturing processes. Designed for process applications that include high-flow purge, epitaxial, and blanket gas control, these controllers provide flow rates up to 300 slpm N2 equivalent. Multiple digital and analog I/O interface options support various communication protocols, and readout screens rotate 180° to facilitate viewing. This story is related to the following:Mass Flow Controllers

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