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Microscopy Technique Could Help Computer Industry Develop 3-D Components

2013-06-25 06:00:00| Industrial Newsroom - All News for Today

Through-Focus Scanning Optical Microscopy (TSOM) technique, developed at NIST for improving optical microscopes, has been applied to monitoring next generation of computer chip circuit components. Sensitive to features as small as 10 nm across, TSOM has been shown to detect tiny differences in 3D shapes of circuit components. This addresses industry measurement challenges for manufacturing process control and maintaining viability of optical microscopy in electronics manufacturing. This story is related to the following:Trade Associations

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