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Miniature Piezo Hexapod provides dynamic error correction.

2015-12-28 14:31:07| Industrial Newsroom - All News for Today

With 1,500 g load capacity, 6-axis Model P-915KWEF is designed for dynamic error correction for 6° of freedom. Capacitance direct metrology sensors and parallel-kinematic design with piezo actuator direct drives result in compact and stiff positioning solution. Product provides 1 nm linear resolution, 0.07 µrad angular resolution, and positioning range up to 70 µm. Mounted inside rotary stages, Model P-915KWEF virtually eliminates wobble and eccentricity errors.

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Category:Industrial Goods and Services

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