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Home › Park Systems Joins Forces With imec To Develop Advancements In Nanoscale AFM Metrology Solutions For Semiconductor Manufacturing

 

Park Systems Joins Forces With imec To Develop Advancements In Nanoscale AFM Metrology Solutions For Semiconductor Manufacturing

2015-03-12 07:39:15| metrologyworld Home Page

Park Systems, world-leader in Atomic Force Microscopes (AFM) announced today they have signed a Joint Development Project (JDP) with nanoelectronics research center imec, to develop in-line AFM metrology solutions of future technology nodes including but not limited to surface roughness, thickness, critical dimension (CD), and sidewall roughness

Tags: systems park solutions develop

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