Offering travel ranges of 50–250 µm, PIHera miniature closed-loop Z-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1 nm. Flexure-guided piezo nanopositioning stage provides vibrationless motion, and FEA-optimized package lends to high stiffness and extended lifetime. Along with positioning accuracy of 0.02%, features include optional vacuum compatibility.