To maximize throughput while promoting precision, PIglide HS uses magnetically preloaded air-bearings on Y axes and vacuum preloaded X-Y puck that floats on reference surface. Cross-beam mounts to Y axis via flexural coupling that provides yaw-compliance without sacrificing system stiffness, and gantry axis is dual air-bearing H-bridge design incorporating dual linear motors and dual linear encoders. Incremental and absolute encoder options are available, and travels reach 500 x 1,000 mm.