Designed to position wafers with diameter up to 12 in. using precise hold and repeat positioning, Wafer Positioning System can be used as automated inline controller or as stand-alone positioner. System offers positioning in microseconds with steps of few microns and repeatability in nanometers. Typical applications include semiconductor and solar production, lithography, display production, surface structuring, surface inspection, measurement chips, and quality control.
This story is related to the following:Positioning Systems