Garching - SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, has delivered its 25th Mask TrackPro System - the newest generation tool - to a leading Asian IDM at the end of 2013. This tool is a cleaning equipment for frontend photomasks in the semiconductor industry. The customer started the installation of this tool in December 2013 and will use it for cleaning and maintenance of optical masks for 193i Lithography in its ...This story is related to the following:Semiconductor Wafer Plating & Cleaning Equipment