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Silicon Carbide XY Air-Bearing Stage is built for precision.

2015-04-13 14:31:06| Industrial Newsroom - All News for Today

Used for semiconductor manufacturing and advanced test/inspection, PlanarHDX is available with passive or active isolation systems. FEA-optimized silicon carbide structure and optimized air-bearing compensation maximize dynamic performance while maintaining geometric characteristics and positioning accuracy. This planar air-bearing platform is capable of 1.5 m/sec scan speeds and 5 g peak acceleration with payload of up to 20 kg while maintaining dynamic tracking and geometric performance.

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Category:Industrial Goods and Services

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