Designed with excimer-grade UV fused silica substrates and polished to better than λ/10 flatness and 10-5 surface quality, Long-Lived Deep UV Excimer Laser Mirrors offer projected lifetimes >30 billion pulses when used in proper photocontamination controlled environment. All dielectric high reflector coatings minimize absorption and maximize reflected energy at 193 nm. With special Pet-G and metal foil packaging, parts are delivered clean and protected from environmental photocontamination.
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