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Vapor Delivery Module aids in silicon/thin film PV cell process.

2013-07-11 14:30:11| Industrial Newsroom - All News for Today

Available for controlling liquid precursors to vaporizing systems for CVD chambers, Vapor Delivery Module is available to realize mass flow control of vapors as based on combination of gas and liquid flow meters. It can be applied for atmospheric, pressurized, and vacuum processes, vaporizing liquid flows from 0.25 to ~1,200 g/h depending on fluid and process conditions. Vaporizers suit vapor deposition and coating processes for production of semiconductor chips, displays, and solar cells. This story is related to the following:Green & CleanSearch for suppliers of: Vapor Control Systems |

Tags: process film delivery cell

Category:Industrial Goods and Services

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