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Vacuum Pump suits load lock and transfer chamber applications.

2013-07-16 14:31:11| Industrial Newsroom - All News for Today

Designed to meet Applied Materials' specification for load lock and transfer chamber pumping, IPUP2™ achieves pumping speed of 180 m³/h. Precision bearings throughout pump ensure smooth, low vibration operation, while oil lubrication of bearings and timing gears eliminates need for routine maintenance between major overhauls. Equipped with horizontal and vertical inlets, IPUP2 provides MTBF of 5+ years with over 3,000,000 load lock cycles. This story is related to the following:Chemical Processing and Waste ManagementSearch for suppliers of:

Tags: applications transfer load lock

Category:Industrial Goods and Services

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